Scanning Electron Microscope Laboratory

The Quanta 200 Environmental Scanning Electron Microscope（ESEM） from FEI Company is a special type of high performance scanning electron microscope (SEM). The instrument can be used in high vacuum mode (HV, <6×10-4Pa), low-vacuum mode (LV, 10~130Pa) and the so called ESEM (Environmental SEM) mode (10~2600Pa) with the Everhart Thornley Detector (ETD), Large Field Detector (LFD), and gaseous secondary electron detector (GSED) respectively. This makes it possible to study samples in a wide range. The highest resolution is 3.0nm (at 30 kV) and the highest magnification is 150, 000. The microscope is equipped with digital image capture and analytical systems, such as electron backscatter diffraction (with Backscattered Electron Detector, BSED) and energy dispersive spectrometer (EDS, GENESIS XM2, from EDAX Company). Qualitative and quantitative analysis, elemental mapping and line scans can be performed with the EDS. And the comprehensive and powerful, yet easy to use, microanalysis application software Genesis XM2 system together with the standard sample assemblages, allowing the materials characterization analyst to obtain the most accurate microanalysis data. The SEM system also equipped with a peltier stage (-5℃) for studies of wet samples in-situ.

Instrument data

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